EHD… A Novel Solution to Nanoscale Cleaning Challenges

As nanoscale geometries become the norm in semiconductor, MEMS, storage, advanced packaging, and other technical fields, new technologies are required to address the removal of submicron contaminants from critical surfaces. EHD, or electrohydrodynamics, creates controlled-velocity nanodroplets that exhibit unique properties for just such cleaning challenges.

EHD Technology Group stands at the forefront of this innovative technology, offering consulting, development, and licensing services to help you profitably apply EHD to your unique nanoscale contaminant removal applications.

EHD Provides these Key Benefits

• Uniquely-small nanodroplet diameters, to under 100nm, able to enter fine patterns
• Better momentum coupling when contaminant and nanodroplet are matched in size
• Essentially dry technology - surface is not wetted, no watermark problems
• Predominantly physical removal reduces reliance on chemical selectivity
• Can operate in vacuum, reducing contaminants from repeated pump/vent cycles
• Low volume fluid usage, < 10 microliters per minute per nozzle, reduces costs