EHD Technology Group
EHD Technology Group (EHDTG) stands at the forefront of the multi-disciplinary field of electrohydrodynamics (EHD), offering consulting, development, and licensing services to help you profitably apply EHD to your unique nanoscale applications.
EHDTG has done significant development work in applying EHD to the problem of removing sub-micron contaminants from high value assemblies such as semiconductor wafers. When applied to this challenge, EHD offers the following advantages:
- Uniquely-small nanodroplet diameters able to enter fine patterns
- Better momentum coupling when contaminant and nanodroplet are matched in size
- "Green" technology greatly reducing chemical usage and disposal
Ongoing work includes other applications, such as the preparation of precursor materials for use in chemical vapor deposition (CVD) systems.
We look forward to discussing your specific challenges that might be solved through the use of EHD.
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| Silicon debris before EHD cleaning | Same area after EHD cleaning |